Dr. Ali Mohammadkhah Profile

Dr. Ali Mohammadkhah

at Corning Incorporated

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Publications (2)

Proceedings Article | 13 November 2024 Presentation

Next generation reticle substrate for EUV lithography

Michael Campion, Ali Mohammadkhah, Carlos Durán, John Maxon

Proceedings Volume 13216, 1321609 (2024) https://doi.org/10.1117/12.3048611

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Proceedings Article | 12 November 2024 Presentation + Paper

Reticle thermal properties impact on overlay at 500W and beyond

Laura Huddleston, Rick Jansen, Emilio Bajonero Canonico, Ali Mohammadkhah, Carlos Duran, Michael Campion, Roni Levi, Yohei Ikebe, Takahiro Onoue, Bryan Kasprowicz, Frank Timmermans, Justin Rademaker

Proceedings Volume 13215, 132150O (2024) https://doi.org/10.1117/12.3034610

KEYWORDS: Reticles, Scanners, Extreme ultraviolet lithography, Thermal deformation, Semiconducting wafers, Overlay metrology, Materials properties, Manufacturing, Image transmission, Tolerancing

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