The construction of transparent electronic devices based on zinc oxide depend on the availability of high performance p
type ZnO. This paper addresses the origin of n type conductivity in undoped ZnO which would require compensation
before p-type material is possible. ZnO films were prepared by magnetron sputtering and filtered cathodic arc deposition
with and without PIII. The intrinsic free carrier properties of have been analyzed by infrared ellipsometry and
temperature dependent conductivity measurements. The correlation of intrinsic carrier density and the crystal size and
orientation as assessed by XRD shows that the free carriers originate from charged intrinsic defects. Even an undoped
ZnO film with large and well oriented grains can exhibit substantial defect conductivity. Temperature dependent
conductivity measurements lead to the conclusion that the charged defect sites give rise to electronic subbands in the
band gap. The defect conductivity of undoped ZnO is comparable to values in the literature for Al-doped ZnO.
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