X-ray spectroscopy is an important method in exploring the material composition and elemental properties. Traditional spectrometers in X-ray spectroscopy include wavelength-dispersive type and semiconductors-based energy-dispersive type. The former possesses high energy resolution but low collecting efficiency and narrow spectral band coverage, while the latter is more efficient and wider in spectral range but give relatively low energy resolution. Spectrometers based on microcalorimeters serve as a new class of energy-dispersive type spectrometers which balance the performance in energy resolution, detection efficiency, and spectral coverage, making them promising in many spectroscopy applications. The superconducting transition-edge sensor (TES) is a representative class of maturely developed microcalorimeters success in array fabrication and readout. We are developing TESs-based X-ray spectrometer at ShanghaiTech University aiming at the application in advanced X-ray light source, like synchrotron radiation or free electron laser facilities. Recently, a prototype has been set up and started running in the lab. This paper introduces a systematic work on data processing with this prototype, focusing on both data acquisition and analysis. With optimization on both hardware and analysis, we have achieved resolution better than 7 eV in the range from 2 keV to 9 keV on the prototype.
In order to meet the demand of X-ray spectroscopy measurement for SHINE and other X-ray light source projects, a multi-pixel TES X-ray spectrometer with high counting rate is currently being developed by the joint team of ShanghaiTech University and Shanghai Institute of Microsystem and Information Technology, etc. Recently, a 16-pixel prototype chip has been completed. With the long-term goal to build a set of X-ray spectrometer with more than 100 channels, which can be applied for the energy band of 0.3 -20 keV. In the mean time, a calibration system constructed, TES based X-ray detector of SBP tested on this system, energy resolution of 5.2 eV@5.9 keV has been obtained.
In the case of no synchrotron radiation source or free electron X-ray laser, it is difficult to obtain narrow energy-band X-rays in energy range lower than the 1 keV, which mainly owing to that soft X-rays are easily absorbed, and the low fluorescence efficiency of this energy range, thus the fluorescence photons are often submerged under a strong scattering background.1 In order to complete the calibration of TES chips in this energy range, our team built up a set of intrinsic energy resolution calibration system for TESs by the 405 nm laser.2-4 Its working principle, structure and preliminary test results will be briefly introduced in this paper.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.