Dr. Cheng-Kuang Chen Profile

Dr. Cheng-Kuang Chen

at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

Repair processes on next generation EUV materials

C. Chen, P. Weng, C. Chiang, P. Chen, Vincent C. Wen, Gerson Mette, Christian Felix Hermanns, Thorsten Hofmann, Klaus Edinger, Y. Li

Proceedings Volume 13216, 132160Q (2024) https://doi.org/10.1117/12.3034694

KEYWORDS: Etching, Photomasks, Extreme ultraviolet, Electron beams, Mask cleaning

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Proceedings Article | 12 November 2024 Presentation + Paper

Realize 193nm inspection for EUV mask

S. Ku, Luke T. Hsu, C. Wang, C. Chen, C. Lu, C. Wu, Vincent C. Wen, Cyrus Chen, Yenlin Chen, Jim Wang, Joanne Tsai, Ling-Chuan Tsao, Yu-Chia Chiang, Ya-Chien Chang, Yi-Hui Zhuo, Yu-Chieh Huang, Ying-Hui Chen, Dongsheng Fan, Amo Chen, Dongxue Chen, Mingwei Li

Proceedings Volume 13216, 132160O (2024) https://doi.org/10.1117/12.3034682

KEYWORDS: Inspection, Extreme ultraviolet, Databases, Defect detection, Deep learning

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Proceedings Article | 11 September 2010 Paper

Slowing down the light by using coupled stereoscopic dielectric metamaterials

Cheng-Kuang Chen, Ta-Jen Yen

Proceedings Volume 7754, 775412 (2010) https://doi.org/10.1117/12.861138

KEYWORDS: Dielectrics, Metamaterials, Resonators, Transparency, Magnetism, Solids, Transmittance, Chemical species, Absorption, Microwave radiation

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