Chaoran Tu
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 7 June 2024 Poster + Paper
Proceedings Volume 13030, 130300H (2024) https://doi.org/10.1117/12.3013933
KEYWORDS: Eye, Gallium arsenide, Scanning electron microscopy, Mid infrared, Reflection, Solar cells, Contamination, Refractive index, Lithography, Fabrication

Proceedings Article | 31 January 2020 Paper
Proceedings Volume 11288, 1128824 (2020) https://doi.org/10.1117/12.2550387
KEYWORDS: Photomasks, Optical lithography, Fourier transforms, Antireflective coatings, Lithography, Nanolithography, Photoresist materials, Near field diffraction, Ultraviolet radiation, Gallium arsenide

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