Charaf A. Cherkouk
at Helmholtz-Zentrum Dresden-Rossendorf eV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 May 2013 Paper
S. Germer, C. Cherkouk, L. Rebohle, M. Helm, W. Skorupa
Proceedings Volume 8767, 876710 (2013) https://doi.org/10.1117/12.2017275
KEYWORDS: Waveguides, Silicon, Reactive ion etching, Refractive index, Light emitting diodes, Finite element methods, Aluminum, Etching, Scanning electron microscopy, Dielectrics

Proceedings Article | 3 May 2013 Paper
S. Germer, C. Cherkouk, L. Rebohle, M. Helm, W. Skorupa
Proceedings Volume 8774, 87740P (2013) https://doi.org/10.1117/12.2014920
KEYWORDS: Waveguides, Silicon, Cladding, Refractive index, Reactive ion etching, Light emitting diodes, Finite element methods, Scanning electron microscopy, Aluminum, Etching

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