Dr. Charles E. May Profile

Dr. Charles E. May

Sr. Director Operations Engg at Broadcom Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 July 2003 Paper

Advanced ASIC defect control

Chuck May, John Knoch, Roger Young

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.497615

KEYWORDS: Inspection, Semiconducting wafers, Scanning electron microscopy, Yield improvement, Defect detection, Information operations, Optical inspection, System on a chip, Data analysis, Manufacturing

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Proceedings Article | 27 August 1997 Paper

Device performance and optimization for 5th- and 6th-generation microprocessors

Bijnan Bandyopadhyay, Jon Cheek, Robert Dawson, Michael Duane, Jim Fulford, Mark Gardner, Fred Hause, Bernard Ho, Daniel Kadoch, Raymond Lee, Ming-Yin Hao, Chuck May, Mark Michael, Brad Moore, Deepak Nayak, John Nistler, Dirk Wristers

Proceedings Volume 3212, (1997) https://doi.org/10.1117/12.284617

KEYWORDS: Oxides, Transistors, Manufacturing, Reliability, Metals, Boron, CMOS technology, Semiconducting wafers, Printing, Capacitance

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Conference Committee Involvement (3)

Data Analysis and Modeling for Patterning Control III

23 February 2006 | San Jose, California, United States

Data Analysis and Modeling for Process Control II

3 March 2005 | San Jose, California, United States

Data Analysis and Modeling for Process Control

26 February 2004 | Santa Clara, California, United States

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