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Chen Song
at Shanghai Institute of Optics
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Publications (1)
Proceedings Article | 24 November 2023 Poster
UV anti-reflection coatings grown by plasma-enhanced atomic layer deposition
Zesheng Lin, Meiping Zhu, Chen Song, Tianbao Liu, Tingting Zeng, Jian Sun, Jianda Shao
Proceedings Volume PC12726, PC127261J (2023) https://doi.org/10.1117/12.2683211
KEYWORDS: Atomic layer deposition, Antireflective coatings, Ultraviolet radiation, Laser damage threshold, Silica, Annealing, Oxygen, Absorption, Coating, Packaging
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