In the past few years, the demand for various types of medical endoscopes such as of gastroscopy, laryngoscopy, and bronchoscopy has been increasing significantly. The advancement of technology has not only created a demand for more accurate and precise medical endoscopes but also created a demand for a more compact and miniaturized medical endoscopes, which could ultimately reduce pain and discomfort for patients or even prevent perforation and infections in the worst-case scenarios. In this study, a Micro-Electro-Mechanical System (MEMS) optical scanner is presented as a new type of medical endoscope. This optical scanner device makes use of a lead-zirconate-titanate piezoelectric (PZT) ceramic film and a chemically etched tapered optical fiber to create a push-pull actuator. The push-pull actuator is then excited to drive the optical fiber as a detector to receive optical signal. The scanner device is fabricated by using photolithography processes to define patterns on our stainless-steel sheets, which will act as the substrate, and Aerosol Deposition (AD) method to deposit thin PZT films onto our stainless-steel sheets. Even though the scanner device is in its early stages of development, we were able to achieve various scanner patterns and motions by the proposed push-pull actuator. ANSYS finite element method was also used to not only provide a fair comparison to the practical results, but also used to design the required resonant frequency that can excite the push-pull actuator
A new aerosol jet printed lead-zirconium-titanate (PZT) actuated scanner for potential 2D scanning application is proposed. The proposed actuator combines a microfabricated PZT MEMS actuator with an off-the-shelf taper optical fiber for a simple overall design. The actuator is fabricated by constructing a 5 μm layer of high quality PZT thin film directly on a 60 μm thick stainless-steel substrate using aerosol deposition method. A chemically etched single-mode optical fiber (SM600) is epoxied onto the cantilever arm of the actuator structure to serve as the scanning waveguide. The scanner is driven at its resonant frequency of 896 Hz and 5650 Hz and the vertical tip displacement of up to 343 μm is achieved with a ±36V input. The finite element analysis of the actuator pad and the fabrication procedure for the design are presented. A comparison of the frequency response test results of the proposed scanner from the harmonic analysis in simulation, laser vibrometer and the optical observing methods is also discussed.
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