Diana Fernandez Rodas
PhD Student at CEA-LETI
SPIE Involvement:
Author
Profile Summary

Diana Fernandez Rodas received her engineering and master’s degrees in materials sciences from the Institut National des Sciences Appliquées (INSA) de Lyon in 2021. Currently, she is as a PhD student at CEA-LETI working on high-resolution 3D patterning.
Publications (4)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12956, PC1295613 (2024) https://doi.org/10.1117/12.3014929
KEYWORDS: Photoresist processing, Nanoimprint lithography, UV optics, Silicon, Silica, Semiconducting wafers, Microlens, Lithography, Grayscale lithography, Etching

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12956, 129560L (2024) https://doi.org/10.1117/12.3009978
KEYWORDS: Nanoimprint lithography, Manufacturing, Atomic force microscopy, Electron beam lithography, Deformation, Shrinkage, Semiconducting wafers, Scanning electron microscopy, Photoresist processing, Standards development, Grayscale lithography

Proceedings Article | 3 October 2023 Presentation + Paper
Proceedings Volume 12653, 126530F (2023) https://doi.org/10.1117/12.2676111
KEYWORDS: Advanced patterning, Electron beam lithography, Grayscale lithography, Material characterization, Manufacturing, Nanoimprint lithography, Scanning electron microscopy, Adhesion, Ultraviolet radiation, Deformation, Silicon, Interfaces, Atomic force microscopy, Shrinkage

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12497, 124970A (2023) https://doi.org/10.1117/12.2658384
KEYWORDS: Microlens, Nanoimprint lithography, Photoresist processing, Atomic force microscopy, Scanning electron microscopy, Manufacturing, Critical dimension metrology, Silicon, Printing, Etching

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