Mr. Dimitrios Tsamados Profile

Dimitrios Tsamados

at Synopsys Switzerland LLC

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Jirka Schatz, Bernd Küchler, Wolfgang Hoppe, Dimitrios Tsamados

Proceedings Volume 11327, 113270I (2020) https://doi.org/10.1117/12.2552102

KEYWORDS: Semiconducting wafers, Silicon, Etching, Oxides, Ions, Photomasks, Optical proximity correction, Lithography, Process modeling

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Keywords/Phrases