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Faezeh Kazemi
at Leibniz-Institut für Oberflächenmodifizierung e.V.
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Publications (2)
Proceedings Article | 8 July 2020 Paper
Optical freeform generation of N-BK7 by fluorine‐based plasma jet machining
Faezeh Kazemi, Georg Boehm, Thomas Arnold
Proceedings Volume 11478, 1147805 (2020) https://doi.org/10.1117/12.2564913
KEYWORDS: Etching, Plasma, Silica, Silicon carbide, Optics manufacturing, Plasma etching, Freeform optics, Optical components, Glasses, Metals
Proceedings Article | 30 December 2019 Paper
Ultra-precise surface machining of N-BK7 using microwave-driven reactive plasma jet machining
Faezeh Kazemi, Georg Boehm, Thomas Arnold
Proceedings Volume 11385, 1138509 (2019) https://doi.org/10.1117/12.2547617
KEYWORDS: Plasma, Etching, Chemical analysis, Optical components, Optical calibration, Metals, Optics manufacturing, Plasma generation, Particles, Chemical species
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