Prof. Feihu Zhang Profile

Prof. Feihu Zhang

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Publications (1)

Proceedings Article | 13 December 2021 Paper

Suppressing the edge roll off in continuous polishing of large planar optics by using extension blocks

Lele Ren, Feihu Zhang, Defeng Liao, Ruiqing Xie, Shijie Zhao, Jian Wang

Proceedings Volume 12072, 120720L (2021) https://doi.org/10.1117/12.2604437

KEYWORDS: Polishing, Surface finishing, Interfaces, Semiconducting wafers, Polyurethane, Chemical mechanical planarization, Analytical research, Telescopes, Silica, Polishing equipment

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