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Floyd McClung
R&D Director at Universal Photonics Inc
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Publications (1)
Proceedings Article | 30 November 2023 Presentation
Next generation polishing consumables for silicon and polysilicon to achieve very low surface roughness with high throughput
Proceedings Volume PC12778, PC1277808 (2023) https://doi.org/10.1117/12.2692020
KEYWORDS: Polishing, Silicon, Surface roughness, Particles, Diamond, Data analysis, Chemistry
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