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Francesco Villasmunta
Ph.D Candidate at Technische Hochschule Wildau
SPIE Involvement:
Author
Area of Expertise:
Silicon Photonics , Cryogenic etching , Reflective interferometry , Optical interconnects , Silicon waveguides
Publications (1)
Proceedings Article | 11 March 2024 Presentation + Paper
Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections
Francesco Villasmunta, Patrick Steglich, Claus Villringer, Sigurd Schrader, Harald Schenk, Andreas Mai, Martin Regehly
Proceedings Volume 12892, 128920I (2024) https://doi.org/10.1117/12.3003146
KEYWORDS: Waveguides, Etching, Cryogenics, Silicon, Fabrication, Design, Semiconducting wafers, Deep reactive ion etching, Optical interconnects, 3D microstructuring, Integrated photonics, Silicon photonics, Electromagnetic simulation
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