Mr. Frank Geelhaar Profile

Frank Geelhaar

at Synopsys Inc

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Publications (1)

Proceedings Article | 30 April 2023 Presentation

A Synopsys TCAD-based workflow to support technology evaluation at 3nm and beyond

Robert Robison, Janet Wilson, Reinaldo Vega, Terence Hook, Frank Geelhaar, Jonathan Cobb, Tim Tsuei

Proceedings Volume 12495, 1249510 (2023) https://doi.org/10.1117/12.2658572

KEYWORDS: Transistors, Device simulation, Back end of line, TCAD, Standards development, Process modeling, Performance modeling, Oscillators, New and emerging technologies, Multilayers

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