Chip-scale LiDAR is the critical component of unmanned platform. We present a single channel FMCW LiDAR integrated module including InP FMCW laser, silicon optical phased array and InP-based balanced photodetector, which achieving the function of multi-target ranging. The integrated chip size is 1.65cm×1.65cm. Coupling efficiency between on-chip laser and silicon waveguide is 62.8%. Common mode rejection ratio of balanced detector is 53.08dB. Ranging accuracy of integrated FMCW LiDAR is 8.82cm.
We propose a compact ultra-broadband silicon-on-insulator polarization rotator. The conversion area of the polarizer rotator is a stair-shaped waveguide, where the middle step is partially replaced by a sub-wavelength grating. The length of the conversion region of the polarization rotator is only 3.36 µm. For TM-TE and TE-TM working cases, the insertion loss is less than 0.9 dB, the polarization conversion efficiency reached 99%, and the polarization extinction ratio is greater than 20 dB, in an ultra-broad wavelength range of 1260 nm to 1740 nm, which covers O-, E-, S-, C-, L-, and Ubands.
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