Dr. Guangyu Sun Profile

Dr. Guangyu Sun

at Beijing Superstring Academy of Memory Technology

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Author

Publications (3)

Proceedings Article | 12 November 2024 Poster + Paper

Accurate ILT model calibration using curvilinear mask and all-angle gauges

Juan Wei, Peng Xu, Guangyu Sun, Jingkang Qin, Jinlai Liu, Cuixiang Wang, Futian Wang, Jiangliu Shi, Qingchen Cao

Proceedings Volume 13216, 1321620 (2024) https://doi.org/10.1117/12.3034460

KEYWORDS: Contour modeling, Performance modeling, Calibration, 3D mask effects, Lithography, Optical proximity correction, Modeling

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Proceedings Article | 10 April 2024 Poster + Paper

Test pattern generation by conditional generative model labeled by image parameters

Tianshuai Qi, Peng Xu, Jingwei Xu, Song Sun, Juan Wei, Guangyu Sun, Zhao Liu, Qingchen Cao, Jiangliu Shi, Zhenjie Yao, Xijin Zhao, Chun Zhang

Proceedings Volume 12954, 129541C (2024) https://doi.org/10.1117/12.3010111

KEYWORDS: Optical proximity correction

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Proceedings Article | 21 November 2023 Poster + Paper

Optimized test pattern selection with machine learning method

Peng Xu, Juan Wei, Jingkang Qin, Jinlai Liu, Guangyu Sun, Song Sun, Cuixiang Wang, Qingchen Cao, Jiangliu Shi

Proceedings Volume 12751, 1275113 (2023) https://doi.org/10.1117/12.2685435

KEYWORDS: Data modeling, Matrices, Optical proximity correction, Machine learning, Lithography, Advanced patterning, Active learning, Process modeling, Deconvolution

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