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Henning T. Katte
Managing Director at Ilis GmbH
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Publications (1)
Proceedings Article | 16 April 2010 Paper
Fast and precise measurements of the two-dimensional birefringence distribution in microlithographic lens materials
Proceedings Volume 7638, 763834 (2010) https://doi.org/10.1117/12.846366
KEYWORDS: Birefringence, Crystals, Polarimetry, Glasses, Polarization, Spatial resolution, Polarizers, Refractive index, Time metrology, Imaging systems
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