CONFERENCE PROCEEDINGS
Advanced Search
Huang Yang
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 18 September 2014 Paper
Aberration functions expanding in Zernike polynomial for lithographic lens
Huang Yang, Hongwei Zhu, Tingwen Xing
Proceedings Volume 9282, 928233 (2014) https://doi.org/10.1117/12.2068275
KEYWORDS: Zernike polynomials, Lithography, Wavefronts, Manufacturing, 193nm lithography, Optics manufacturing, Wavefront aberrations, Code v, Optical design, Shape analysis
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top