Dr. Hyunwoo Chae Profile

Dr. Hyunwoo Chae

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Proceedings Article | 10 April 2024 Presentation + Paper

E-beam simulation for advanced SEM applications in semiconductor industry

Wooyoung Cheon, Taejin Moon, In Kwon, Jinwoo Lee, Jaeyong Lee, Yongjae Kwon, Ashok Ramu, Seonghoon Jin, Tsuji Yukihide, Hyunwoo Chae, Chulwoo Park, Hyunsuk Choi, Kwangseok Lee, Byungseong Ahn, Jaehun Yang, Ami Ma, Qhwan Kim, Donghyeok Im, Jaehyun Bae, Jongcheon Sun, Su-Young Lee, Shinwook Yi, Jiseong Doh, Kyu Baik Chang, Songyi Han, Jaehoon Jeong, Yusin Yang, Dae Sin Kim

Proceedings Volume 12955, 129551J (2024) https://doi.org/10.1117/12.3010074

KEYWORDS: Monte Carlo methods, Scanning electron microscopy, TCAD, Scattering, Inspection, Semiconductors, Computer simulations, Physics, Critical dimension metrology

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