Mr. Ignat Moskalenko Profile

Ignat Moskalenko

at Siemens Digital Industries Software

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 13 June 2022 Presentation + Paper

Presentation + Paper

Pareto front optimization for enhanced model prediction accuracy

David Fryer, Ignat Moskalenko, Tung-Yu Wu, Meng-Shiun Chiang, Chun Yen Liao, Tsung-Wei Lin, Chun-Sheng Wu, Chao-Yi Huang, Luke Lo, Xiang Fang, Germain Fenger, Farruh Shahidi

Proceedings Volume 12052, 120520Q (2022) https://doi.org/10.1117/12.2614118

KEYWORDS: Optimization (mathematics), Calibration, Data modeling, Optical proximity correction, Binary data, Performance modeling, Genetic algorithms, Process modeling, Computer simulations, Precision calibration

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Proceedings Article | 13 June 2022 Presentation

Presentation

Advances in OPC etch modeling

Germain Fenger, Youngchang Kim, Ignat Moskalenko, Johnny Herrera, Alexander Drutsa

Proceedings Volume PC12056, PC1205605 (2022) https://doi.org/10.1117/12.2614280

KEYWORDS: Etching, Reactive ion etching, Optical proximity correction, Neural networks, Machine learning, Ions

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Proceedings Article | 22 February 2021 Paper

Paper

Fast rigorous modeling of photoresist in lithography

David Fryer, Ignat Moskalenko, Germain Fenger, Daman Khaira, Yunfei Deng, Yuri Granik

Proceedings Volume 11613, 116130H (2021) https://doi.org/10.1117/12.2584771

KEYWORDS: SRAF, 3D modeling, Printing, Data modeling, 3D printing

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