Dr. Jan Engelmann
at KLA GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2015 Paper
R. Melzer, C. Hartig, Gunter Grasshof, B. Sass, F. Koch, Z. Xu, Z. Shen, J Engelmann
Proceedings Volume 9424, 942429 (2015) https://doi.org/10.1117/12.2076151
KEYWORDS: Single crystal X-ray diffraction, Etching, Critical dimension metrology, Semiconducting wafers, Optical proximity correction, Scatterometry, Transmission electron microscopy, Silicon, Modeling, Microelectronics

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top