Mr. Jang Hwan Kim Profile

Jang Hwan Kim

at Tokyo Electron Korea Ltd

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Publications (1)

Proceedings Article | 25 May 2022 Poster + Paper

Metal oxide resist (MOR) EUV lithography processes for DRAM application

Shinichiro Kawakami, Tomoya Onitsuka, Yuya Kamei, Satoru Shimura, Chan Ha Park, Sang Ho Lee, Hong Goo Lee, Jae Wook Seo, Jin il Kim, Jun ho Roh, Jin Hyung Kim, Ki Lyoung Lee, Seiji Nagahara, Jeoung Yun Kim, Jang Hwan Kim, Shingo Inaba, Jong Eun Park

Proceedings Volume 12055, 120550N (2022) https://doi.org/10.1117/12.2613974

KEYWORDS: Metals, Contamination, Semiconducting wafers, Optical lithography, Extreme ultraviolet lithography, Contamination control, Coating, Bridges, Manufacturing, Oxides

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