Mr. Jeong Nyeon Kim Profile

Jeong Nyeon Kim

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Proceedings Article | 1 April 2015 Paper

Characterization of complex materials with elastic discontinuities using scanning acoustic microscopy

Xin Li, Jeong Nyeon Kim, Judith Todd, Richard Tutwiler, Ik-Keun Park

Proceedings Volume 9437, 943703 (2015) https://doi.org/10.1117/12.2084485

KEYWORDS: Acoustics, Interfaces, Copper, Metals, Microscopy, Ceramics, Transducers, Reflectivity, Microscopes, Reliability

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Ceramics bonded to metal joints may develop flaws due to residual stresses that develop during the cooling process. Scanning acoustic microscopy is a well-recognized tool for charactering elastic properties and can be applied to materials with elastic discontinuities such as debonding at the ceramic/metal interface. Acoustic information is obtained using the V (z) curve method, which measures the output voltage signal of a transducer as a function of the distance between the transducer and a specimen. The velocity of the surface acoustic waves, V_saw, can be calculated from the V (z) curve. In this work, a simulation of the V (z) curve was updated. The pupil-function splitting method was combined with the angular-spectrum approach of V (z) theory in order to obtain the V (z) curve for interfaces between different materials. The V_saw values at the interface were calculated from the simulated V (z) curve. A series of experiments were performed to measure the V_saw values at the interface of a Si₃N₄/Cu joint using the scanning acoustic microscope. By comparing the measured values with the calculated values, the reliability of this simulation was verified. The simulation can be used to test the boundary conditions of bimaterial samples.

Proceedings Article | 11 April 2013 Paper

Multilayer transfer matrix characterization of complex materials with scanning acoustic microscopy

Jeong Nyeon Kim, Richard Tutwiler, Dong Ryul Kwak, Ikkeun Park, Chiaki Miyasaka

Proceedings Volume 8694, 86941O (2013) https://doi.org/10.1117/12.2012255

KEYWORDS: Acoustics, Silicon, Multilayers, Titanium, Platinum, Solids, Thin films, Reflectivity, Microscopy, Transducers

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A multilayer structured thin film system, such as a biomedical thin film, MEMS (Micro Electric Mechanical System)/NEMS (Nano Electric Mechanical System) devices, and semiconductors, is widely used in various fields of industries. To non-destructively evaluate the multilayer structured thin film system, a mechanical scanning acoustic reflection microscope has been well recognized as a useful tool in recent years. Especially, the V(z) curve method with the scanning acoustic microscope is used to characterize the very small area of the system. In this study, V(z) curve simulation software for simulating transducer output when we transmit an ultrasound wave into the specimen has been developed. In the software, the Thompson-Haskell transfer matrix method is applied to solve for the reflectance function. All input and output interfaces incorporated in a GUI interface for users’ convenience. Surface acoustic wave velocities are calculated from the simulated V(z) curves. For the precise calculation advanced signal processing techniques are utilized. The surface acoustic wave velocity is compared to that from an experiment with a bulk solid. We also tested the simulation’s thickness sensitivity by simulating models with different thickness in nanoscale. A series of experiments with multilayered solids are carried out and the results are compared with the simulation results. It was the first time a comparison of analytical versus experimental for V(z) curves for multilayered system were performed. For the multilayered specimen, silicon (100) is used as a substrate. Titanium (thickness: 10 nanometer) and platinum (thickness: 100 nanometer) are deposited respectively.

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