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Jerome Loicq
at Technische Univ Delft
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Publications (1)
SPIE Journal Paper | 27 February 2024
Dynamic coherence scanning interferometry based on an optical phase mask for simultaneous measurement of local induced vibration and local topology change of a mirror
OE, Vol. 63, Issue 02, 024111, (February 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.2.024111
KEYWORDS: Mirrors, Equipment, Microlens array, Vibration, Interferograms, Cameras, Interferometers, Mirror surfaces, Metrology, Phase shifts
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