Nanoelectromechanical Switches (NEMS) is an emerging switch technology, and it can be applied to replace current metaloxide switches in some fields. Its unique operating principle compared to conventional switches brings advantages in some specific conditions, such as operation under extreme environments. As the CMOS-based electronics reaching their limit on certain aspects like power consumption, footprints, and operating frequencies, the NEMS may be able to become a potential solution with the potential to replace CMOS in some applications. In addition, the NEMS can be a complement to CMOS in other situations. However, NEMS itself is also facing some challenges such as the advantage of CMOS technology in manufacture, as well as emerging new metal-oxide-semiconductor technology such as FinFET. In this article, Nanoelectromechanical Switch's potential advantages over conventional metal-oxide-semiconductor, such as power consumption, reliability, and operating frequencies, are being analyzed. The challenges when applying NEMS were discussed. Furthermore, possible solutions are also proposed. According to the research result, NEMS has the following advantages: lower power consumption, higher reliability, and better-operating frequencies. Challenges are mainly the reliability issue, problems with manufacturer standards. A possible solution is the CMOS-NEMS combination.
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