Dr. Jingjing Peng Profile

Dr. Jingjing Peng

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Proceedings Article | 20 November 2024 Paper

Arrangement optimization of fiber Bragg grating temperature sensor network for wafer surface temperature field reconstruction with grey wolf optimization-Kriging algorithm based on K-medoids

Yuhao Feng, Tao Wu, Xiangze Meng, Jingjing Peng, Fei Xing, Ting Sun

Proceedings Volume 13243, 132430L (2024) https://doi.org/10.1117/12.3036288

KEYWORDS: Semiconducting wafers, Reconstruction algorithms, Sensors, Mathematical optimization, Fiber Bragg gratings, Temperature metrology, Temperature sensors, Temperature distribution, Lamps, Structural monitoring

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