John Duff
Product Manager at GenISys GmbH
SPIE Involvement:
Author | Instructor
Publications (3)

Proceedings Article | 16 September 2022 Paper
Markus Greul, Holger Sailer, Matthias Wahl, John Duff, Jeff Michelmann, Richard Bojko, Dmitri Titko, Konrad Rössler, Nezih Ünal
Proceedings Volume 12325, 123250P (2022) https://doi.org/10.1117/12.2640799
KEYWORDS: Photomasks, Photonic devices, Manufacturing, Calibration, Line edge roughness, Lithography, Waveguides, Photonics

Proceedings Article | 16 September 2022 Paper
Nezih Unal, John Duff, Michael Krueger, Ulrich Hofmann, Dmitri Titko
Proceedings Volume 12325, 123250N (2022) https://doi.org/10.1117/12.2640513
KEYWORDS: Dynamic signature verification, Photomasks, Calibration, Lithography, Process modeling, Model-based design, Data modeling, Performance modeling

Proceedings Article | 23 April 1999 Paper
John Duff, John Allsop
Proceedings Volume 3665, (1999) https://doi.org/10.1117/12.346211
KEYWORDS: Metrology, Critical dimension metrology, Calibration, Photomasks, Manufacturing, Standards development, Excel, Opacity, Control systems, Process control

Course Instructor
SC579: Photomask Fabrication and Technology Basics
This course provides attendees with a working knowledge of photomask technology. The course focuses on process flow with emphasis in the challenges associated with design data conversions, lithography, process, metrology, inspection, and advanced mask manufacture. Although an entry-level course, the following topics are reviewed in considerable detail: o Design Data conversion tools and conversion strategies o Patterning Technologies (e-beam and laser) and key resolution and write time drivers o Advanced Mask Processing (Bake, Develop, Etch, CAR) o Mask Materials (NTAR, etc.) Other topics such as the application of SPC, signature matching, Phase Shifting Masks, and Imprint Templates will also be covered.
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