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Jong-Ho Lim
at SAMSUNG Electronics Semiconductor
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Publications (1)
Proceedings Article | 23 March 2011 Paper
Advanced scanner matching using freeform source and lens manipulators
Jong-Ho Lim, Kyung Kang, Sung-Man Kim, Wenjin Shao, Fei Du, Zhengfan Zhang, Zongchang Yu, John Barbuto, Venu Vellanki, Yu Cao, Ronald Goossens, Seung-Hoon Park, Chris Park, Stefan Hunsche, Junwei Lu
Proceedings Volume 7973, 79732A (2011) https://doi.org/10.1117/12.881680
KEYWORDS: Scanners, Semiconducting wafers, Birefringence, Critical dimension metrology, Diffractive optical elements, Metrology, Cadmium, Fiber optic illuminators, Data modeling, Computational lithography
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