Jose P. González
at Lucent Technologies
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 August 2000 Paper
Ana Sacedon, Jesus Inarrea, Manuel Alvarez, Pilar Prieto, Jose Plaza, Jose Hernandez, Carlos Martinez, Salvador Fernandez, Pablo Dominguez, Jose Gonzalez, Manuel Larran, Carlos Mata
Proceedings Volume 4182, (2000) https://doi.org/10.1117/12.410078
KEYWORDS: Particles, Semiconducting wafers, Metals, Inspection, Contamination, Atmospheric particles, Scanning electron microscopy, Contact lenses, Wafer inspection, Wafer-level optics

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