Currently, integrated optoelectronic technology has made significant progress in commercial applications. However, existing technologies are approaching their theoretical limits. How to introduce new materials to achieve novel on-chip optical field control and generate disruptive breakthroughs will be crucial for meeting the future demands of optical computing, optical communication, optical sensing, and other applications. Chalcogenide materials, also known as chalcogenide glass materials, mainly refer to compounds containing sulfur, selenium, tellurium, and other chalcogen elements. They not only possess excellent nonlinear optical properties and excellent micro-nano processing characteristics but also some specific compositions of chalcogenide glass exhibit nonvolatile phase transition characteristics for exploring nonvolatile reconfigurable photon platforms. This paper will mainly introduce some progress in our research on scalable fabrication techniques for integrated photonic devices based on chalcogenide materials.
Nonvolatile light-field manipulation via electrically-driven phase transition of chalcogenide phase change materials (PCMs) is regarded as one of the most powerful solutions to low-power-consumption and compact integrated reconfigurable photonics. However, before the breakthrough in large-scale integration approaches linked to wafer foundries, phase-change non-volatile reconfigurable photonics could hardly see their widespread practical applications. Here we demonstrate nonvolatile photonic devices fabricated by back-end-of-line (BOEL) integration of PCMs into the commercial silicon photonics platform. A narrow trench etched into the BOEL dielectric layer exposed the waveguide core and allowed for the direct deposition of various PCM films on the waveguide in the functional areas. Fine-tuning the nonvolatile phase transition of Sb2Se3 via a PIN microheater was verified by realizing the post-fabrication trimming of silicon photonic devices. Our work highlights a reliable platform for large-scale PCM-integrated photonics and validates its precise nonvolatile reconfigurability.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.