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Keiji Akai
Marketing Specialist at Tokyo Electron Ltd
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Publications (3)
Proceedings Article | 29 March 2013 Paper
Advances in directed self assembly integration and manufacturability at 300 mm
Proceedings Volume 8682, 86820K (2013) https://doi.org/10.1117/12.2012018
KEYWORDS: Etching, Polymethylmethacrylate, Manufacturing, Picosecond phenomena, Ecosystems, Semiconducting wafers, Inspection, Directed self assembly, Materials processing, Polymers
Proceedings Article | 21 March 2012 Paper
Pattern scaling with directed self assembly through lithography and etch process integration
Benjamen Rathsack, Mark Somervell, Josh Hooge, Makoto Muramatsu, Keiji Tanouchi, Takahiro Kitano, Eiichi Nishimura, Koichi Yatsuda, Seiji Nagahara, Iwaki Hiroyuki, Keiji Akai, Takashi Hayakawa
Proceedings Volume 8323, 83230B (2012) https://doi.org/10.1117/12.916311
KEYWORDS: Etching, Semiconducting wafers, Line edge roughness, Picosecond phenomena, Lithography, Polymers, Polymethylmethacrylate, Chemical analysis, Silicon, Directed self assembly
Proceedings Article | 20 May 2006 Paper
The design and qualification of the TEL CLEAN TRACK ACT M photomask coating tool at Intel
Andrew Jamieson, Thuc Dam, Ki-Ho Baik, Ken Duerksen, Elie Eidson, Keiji Akai, Kazuya Hisano, Norifumi Kohama, Shinichi Machidori
Proceedings Volume 6283, 62831P (2006) https://doi.org/10.1117/12.681751
KEYWORDS: Photomasks, Coating, Manufacturing, Photoresist processing, Semiconducting wafers, Head, Ultraviolet radiation, Particles, Thin film coatings, Wafer manufacturing
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