Mr. Kelvin Yih-Yuh Doong Profile

Kelvin Yih-Yuh Doong

Section Mananger at Taiwan Semiconductor Mfg Co

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Publications (4)

Proceedings Article | 24 March 2006 Paper

Global pattern density effects on low-k trench CDs for sub-65-nm technology nodes

Ju-Wang Hsu, J. Shieh, Kelvin Doong, L. Hung, S. Lin, C. Ting, S. Jang, K. Young, M. Liang

Proceedings Volume 6152, 615205 (2006) https://doi.org/10.1117/12.656409

KEYWORDS: Etching, Critical dimension metrology, Photomasks, Metals, Cadmium sulfide, Semiconducting wafers, Plasma, Scanning electron microscopy, Lithography, Optical lithography

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Proceedings Article | 10 July 2003 Paper

Library-based process test vehicle design framework

Kelvin Doong, L.-J. Hung, Susan Ho, S. Lin, K. Young

Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485264

KEYWORDS: Structural design, Field effect transistors, Connectors, Diffractive optical elements, Electronic design automation, Standards development, Analog electronics, Resistors, Product engineering, Ions

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Proceedings Article | 12 July 2002 Paper

Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures (AFS-TS)

Kelvin Doong, Sunnys Hsieh, S. Lin, J. Wang, Binson Shen, L. Hung, J. Guo, I. Chen, K. Young, Charles Hsu

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475644

KEYWORDS: Defect detection, Semiconducting wafers, Structural design, Logic, Resistance, Failure analysis, Inspection, Electrical breakdown, Metals, Prototyping

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Proceedings Article | 23 April 2001 Paper

Mechanism and annihilation of shallow-trench-isolation-enhanced poly-mask-edge N+/P-well junction leakage

Kelvin Doong, Sheng-che Lin, Sunnys Hsieh, Binson Shen, Yu-Hao Yang, Peter Chen, Charles Hsu

Proceedings Volume 4406, (2001) https://doi.org/10.1117/12.425269

KEYWORDS: Oxides, Ion implantation, Logic, Failure analysis, Etching, Photomasks, Thermal oxidation, Chlorine, Field effect transistors, Oxidation

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