Mr. KyuGyeom Kim Profile

KyuGyeom Kim

XMRC at Wonkwang Univ

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Publications (2)

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Proceedings Article | 10 September 2005 Paper

Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system

Kyu Gyeom Kim, Jae Hee Kim, Jong Hwan Min, Kyong Woo Kim, Young Man Kwon, Jin Young Min, Kwon Ha Yoon

Proceedings Volume 5918, 59181A (2005) https://doi.org/10.1117/12.626316

KEYWORDS: X-ray optics, Mirrors, X-rays, Kinematics, X-ray microscopy, X-ray sources, Microscopes, Reflectivity, Interferometers, Control systems

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This paper presents a method of a nano-positioning control for the high precision focusing of a doubled ellipsoidal condenser reflective mirror using 5-axis manipulator. We have developed the compact vertical type of soft X-ray microscopy system with 50nm resolution for biomedical application. This microscopy system is composed of a laser plasma x-ray source, doubled ellipsoidal condenser reflective optics, diffractive zone plate optics and MCP coupled with CCD to record an x-ray image. The X-ray source was focused on a sample by a doubled ellipsoidal condenser reflective mirror. X-ray source focusing will increase the photon density in the object plane and is very important to approach high resolution imaging. Required degree of freedom (DOF) of optics aligner in X-ray microscope is dependent on the kind of optics, but generally 5-DOF is needed. We used 5-axis manipulator that consists of three linear motions (X, Y and Z) and two tilting motions (θx, θy). A linear translation stage is adopted a kind of DC motor with a linear resolution 50nm and travel range of 5mm. The mechanism was controlled with PID controller augmented with closed feedback loop for precision control. A two axis tilt stage is employed a design resolution of 0.23μrad and tilt range of ±7deg. We have designed 5-axis manipulator for the precision position control of condenser mirror optics and have developed to control algorithm by inverse kinematics. The performance of the proposed 5-DOF manipulator is evaluated by using a laser interferometer system with two plane mirror reflectors. The experimental results are depicted in this paper.

Proceedings Article | 31 August 2005 Paper

Development of compact soft x-ray microscopy using a laser-produced plasma source

K. W. Kim, Y. M. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, J. Y. Min, K. H. Yoon

Proceedings Volume 5918, 59181C (2005) https://doi.org/10.1117/12.626312

KEYWORDS: X-rays, Microscopes, Plasma, X-ray microscopy, X-ray imaging, X-ray optics, Mirrors, Zone plates, Charge-coupled devices, Sensors

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We demonstrate compact transmission soft X-ray microscope system with 50 nm spatial resolution for the life and physical science. This x-ray microscope operates at photon energy from 284 eV to 543 eV, so called 'water window' region (2.3~4.4nm), where natural contrast between carbon (protein) and oxygen(water) allows imaging of unstained biological material in their natural, hydrated environment. The compact transmission soft x-ray microscope is based on a laser plasma x-ray source, tandem ellipsoidal condenser reflective optics, diffractive zone plate optics and x-ray sensitive charge-coupled device (CCD) to record an x-ray image. The source is a liquid-jet target laser plasma source, which is practically debris free and suitable for high average power operation. The flux, brightness and bandwidth of this source has been simulated and optimized for X-ray microscopy for biology application. A tandem ellipsoidal reflective mirror operates as condenser and illuminates the sample. The high resolution imaging is currently performed with a ~12% efficient nickel zone plate with an outmost zone width of 35nm. In conclusion, we suggested a possibility of the compact soft x-ray microscopy system with 50 nm spatial resolution as a suitable tool for the wide range of studies such as biological imaging, environmental samples, and nanostructure analysis.

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