Dr. Mikhail O. Izyumov Profile

Dr. Mikhail O. Izyumov

at Institute of Physics and Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 31 January 2022 Paper

Ilia Uvarov, Mikhail Izyumov

Proceedings Volume 12157, 121570I (2022) https://doi.org/10.1117/12.2623060

KEYWORDS: Switches, Chromium, Microelectromechanical systems, Electrodes, Reliability, Adhesives

Proceedings Article | 15 March 2019 Paper

I. Amirov, E. Gorlachev, L. Mazaletsky, M. Izyumov

Proceedings Volume 11022, 1102221 (2019) https://doi.org/10.1117/12.2521275

KEYWORDS: Nanowires, Plasma etching, Silicon, Etching, Argon, Plasma, Platinum, Scanning electron microscopy, Nanostructures, Amorphous silicon

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