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Nhi Y. Le
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Publications (1)
Proceedings Article | 4 October 2024 Presentation + Paper
Simulation and fabrication of a high aspect ratio embedded point-like transmission target
Gabriella Dalton, Courtney L. Sovinec, Matthew Jordan, Nhi Le, Edward Jimenez, Noelle Collins
Proceedings Volume 13150, 131500C (2024) https://doi.org/10.1117/12.3027094
KEYWORDS: Fabrication, X-rays, Monte Carlo methods, Copper, Device simulation, Silicon, Spatial resolution, Scanning electron microscopy, Image quality, Design
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