Mr. Olivier Guillaume Profile

Olivier Guillaume

Resist & Track Process Engg at X-FAB France SAS

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Publications (2)

Proceedings Article | 15 March 2006 Paper

Evaluation of an advanced process control solution to detect wafer positioning issues within the hot and cold plate modules of a lithography track

Olivier Guillaume, Marc Bouchardy, Louis-Pierre Armellin

Proceedings Volume 6155, 61550K (2006) https://doi.org/10.1117/12.655573

KEYWORDS: Semiconducting wafers, Temperature metrology, Process control, Chemical elements, Lithography, Wafer testing, Robotics, Sensors, Data communications, Critical dimension metrology

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Proceedings Article | 10 May 2005 Paper

Separating cluster contribution to improve CD distribution using simultaneous dose-focus monitoring on production wafers

Louis-Pierre Armellin, Virginie Dureuil, Olivier Guillaume, Philippe Alet, Brad Eichelberger, Michel Egreteau, Marco Polli, Berta Dinu

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598045

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scanners, Scanning electron microscopy, Finite element methods, Calibration, Control systems, Diagnostics, Temperature metrology, Statistical modeling

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