Dr. Parham Yaghoobi
Senior Product System Engineer at ASML
Publications (2)

Proceedings Article | 22 February 2021 Presentation
Eric Verhoeven, Ron Schuurhuis, Marcel Mastenbroek, Peter Jonkers, Frank Bornebroek, Arthur Minnaert, Harrie Van Dijck, Parham Yaghoobi, Geert Fisser, Payam Tayebati, Klaus Hummler, Roderik Van Es
Proceedings Volume 11609, 1160908 (2021) https://doi.org/10.1117/12.2583992
KEYWORDS: High volume manufacturing, Extreme ultraviolet lithography, Stochastic processes, Scanners, Overlay metrology, Logic, Lithography, Critical dimension metrology

Proceedings Article | 22 September 2020 Presentation
Proceedings Volume 11517, 1151703 (2020) https://doi.org/10.1117/12.2572356
KEYWORDS: High volume manufacturing, Extreme ultraviolet, Logic devices, Manufacturing, Scanners, Lithography, Logic, Overlay metrology, Critical dimension metrology, Stochastic processes

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