Mr. Peiwen Chen Profile

Peiwen Chen

at Zhejiang Univ

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Publications (2)

Proceedings Article | 12 December 2018 Paper

Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating

Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, Weidong Fang

Proceedings Volume 10848, 108480G (2018) https://doi.org/10.1117/12.2505677

KEYWORDS: Mirrors, Optical design, Sensors, Interferometry, Optical resonators, Microopto electromechanical systems, Modal analysis, Mechanical sensors, Structural sensing, Diffraction gratings

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Proceedings Article | 5 November 2018 Paper

Thermal stress of MOEMS accelerometers based on grating interferometric cavity

Weidong Fang, Qianbo Lu, Jian Bai, Dandan Han, Peiwen Chen

Proceedings Volume 10815, 108151H (2018) https://doi.org/10.1117/12.2502273

KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Silicon, Interferometry, Thermal effects, Microopto electromechanical systems, Finite element methods, Adhesives, Thermal modeling

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