Dr. Peter Ivanov Profile

Dr. Peter Ivanov

Researcher at Institute of Microelectronics of Barcelona IMB-CNM

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 30 December 2008 Paper

Preconcentrator-based sensor µ-system for low-level benzene detection

P. Ivanov, I. Gràcia, F. Blanco, J.-P. Raskin, R. Cumeras, N. Sabaté, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, C. Cané

Proceedings Volume 7268, 72680S (2008) https://doi.org/10.1117/12.807433

KEYWORDS: Sensors, Gas sensors, Silicon, Fabrication, Deep reactive ion etching, Palladium, Semiconducting wafers, Wafer bonding, Optical lithography, Aluminum

Read Abstract +

Proceedings Article | 17 May 2007 Paper

Micro and nanotechnologies for the development of an integrated chromatographic system

O. Casals, A. Romano-Rodríguez, X. Illa, C. Zamani, A. Vilà, J. R. Morante, I. Gràcia, P. Ivanov, N. Sabaté, L. Fonseca, J. Santander, E. Figueras, C. Cané

Proceedings Volume 6589, 65891A (2007) https://doi.org/10.1117/12.721924

KEYWORDS: Gas sensors, Sensors, Silicon, Glasses, Deep reactive ion etching, Gases, Semiconducting wafers, System integration, Chromium, Palladium

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years