Dr. Pramod Subramonium Profile

Dr. Pramod Subramonium

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Publications (1)

Proceedings Article | 22 February 2021 Presentation

Etch and deposition co-optimization: a pathway to enabling high aspect ratio 3D NAND Flash ONON channel hole patterning

Meihua Shen, John Hoang, Hao Chi, Danna Qian, George Papasouliotis, Jonathan Church, Pramod Subramonium, Eric Hudson, Leonid Belau, Katherine Haynes, Matt Weimer, Ragesh Puthenkovilakam, Sirish Reddy, Sonal Bhadauriya, Thorsten Lill

Proceedings Volume 11615, 1161508 (2021) https://doi.org/10.1117/12.2582627

KEYWORDS: Etching, Optical lithography, Photomasks, Oxides, Distortion, Data centers

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