The measurement of freeform optical surfaces is a challenging task in precision manufacturing. Those widely used instruments such as the point-scanning profiler and sub-aperture stitching interferometer are costly expensive and time consuming. The phase measuring deflectometry is a powerful measuring technique for complex optical surfaces. To image the measuring efficiency and reduce the number of the captured images, the modulating information can be reutilized in the second direction in the bi-directional phase shifting, so that totally only 6 images are needed. The tracing deviations caused by the form errors behave differently with those caused by the position errors. Then precise localization of the measured surface can be realized by error separation, so that detecting of feature points can be avoided. Experimental results demonstrate that the measurement error is below 150 nm.
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