Mr. Sang-Jin Kim Profile

Sang-Jin Kim

at ASML Korea Co Ltd

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Author

Publications (2)

Proceedings Article | 28 April 2023 Paper

Improvement of CD uniformity using a new selective exposure focusing method

Seonho Lee, Jaewoong Sohn, Hyosung Lee, Jaehyung Jung, Youngjun Kim, Heehong Lee, HyoungHwa Jin, Harim Oh, Yongchan Kim, Maarten Boogaarts, Nataliya Nishchenko, Jin-Sung Kim, Noh-Kyoung Park, Sang-Jin Kim, Javier Loaiza Rivas, Jens Wustenfeld, Martin de Nivelle, Valerio Altini

Proceedings Volume 12494, 124940Y (2023) https://doi.org/10.1117/12.2657203

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Scanners, High volume manufacturing, Lithography, Optical lithography, Distributed interactive simulations, Device simulation, Process control

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Proceedings Article | 13 March 2018 Presentation + Paper

Scanner focus metrology and control system for advanced 10nm logic node

Junghun Oh, Kwang-Seok Maeng , Jae-Hyung Shin, Won-Woong Choi, Sung-Keun Won, Cedric Grouwstra, Mohamed El Kodadi, Stephan Heil, Vidar van der Meijden, Jong Kyun Hong , Sang-Jin Kim, Oh-Sung Kwon

Proceedings Volume 10585, 105851O (2018) https://doi.org/10.1117/12.2297442

KEYWORDS: Scanners, Semiconducting wafers, Metrology, Control systems, Interfaces, Logic, Critical dimension metrology, Lithography, High volume manufacturing, Environmental monitoring

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