CONFERENCE PROCEEDINGS
Advanced Search
Shakib Morshed
at Auburn Univ
SPIE Involvement:
Author
Publications (2)
SPIE Journal Paper | 1 January 2011 Open Access
Fabrication of polynomial 3-D nanostructures in Si with a single-step process
Dong Liu, Shakib Morshed, Bo Zhou, Barton Prorok, Soo-Young Lee
JM3, Vol. 10, Issue 1, 010501, (January 2011) https://doi.org/10.1117/12.10.1117/1.3563601
KEYWORDS: Silicon, Polymethylmethacrylate, Lithography, Nanolithography, Reactive ion etching, Etching, Electron beam lithography, Atomic force microscopy, Nanostructures, Scattering
DOWNLOAD PAPER
Proceedings Article | 18 May 2006 Paper
Enhancing the sensitivity of microcantilever-based sensors via geometry modification
Proceedings Volume 6223, 62230S (2006) https://doi.org/10.1117/12.663682
KEYWORDS: Beam shaping, Sensors, Finite element methods, Modal analysis, Microelectromechanical systems, Liquids, Shape analysis, Biological detection systems, Biological weapons, Environmental sensing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top