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Shigetoshi Sakimura
at Hitachi Ltd
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Publications (1)
Proceedings Article | 26 March 2019 Paper
Deep learning's impact on contour extraction for design based metrology and design based inspection
Ryo Yumiba, Masayoshi Ishikawa, Shinichi Shinoda, Shigetoshi Sakimura, Yasutaka Toyoda, Hiroyuki Shindo, Masayuki Izawa
Proceedings Volume 10959, 1095912 (2019) https://doi.org/10.1117/12.2514898
KEYWORDS: Image segmentation, Scanning electron microscopy, Image processing, Data modeling, Metrology, Surgery, Feature extraction, Shape analysis, Statistical modeling, Pattern recognition
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