Dr. Shinichi Matsubara
at Hitachi Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2020 Presentation
Shinichi Matsubara, Hiroyasu Shichi, Tomihiro Hashizume, Masami Ikota
Proceedings Volume 11325, 1132513 (2020) https://doi.org/10.1117/12.2551673

Proceedings Article | 26 March 2019 Presentation + Paper
Shinichi Matsubara, Hiroyasu Shichi, Sayaka Tanimoto, Masami Ikota, Tomihiro Hashizume
Proceedings Volume 10959, 109591Y (2019) https://doi.org/10.1117/12.2514934
KEYWORDS: Ions, Ion beams, Scanning electron microscopy, Neon, Argon, Semiconductors, Crystals, Hydrogen, Silicon, Visualization

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