Dr. Soo Ryu Profile

Dr. Soo Ryu

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 16 September 2022 Paper

Status of curvilinear data format working group

Jin Choi, Soo Ryu, Sukho Lee, Minah Kim, Sanghee Lee, Peter Buck, Bhardwaj Durvasula, Sayalee Gharat, Vlad Liubich

Proceedings Volume 12325, 1232508 (2022) https://doi.org/10.1117/12.2641557

KEYWORDS: Photomasks, Optical proximity correction, Extreme ultraviolet, Optical lithography, Mask making

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SPIE Journal Paper | 1 November 2021 Open Access

Study on various curvilinear data representations and their impact on mask and wafer manufacturing

Jin Choi, Soo Ryu, Sukho Lee, Minah Kim, JoonSoo Park, Peter Buck, Ingo Bork, Bhardwaj Durvasula, Sayalee Gharat, Nageswara Rao, Ravi Pai, Sandeep Koranne, Alexander Tritchkov

JM3, Vol. 20, Issue 04, 041403, (November 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.041403

KEYWORDS: Photomasks, Tolerancing, Optical proximity correction, Semiconducting wafers, Manufacturing, Extreme ultraviolet, Vestigial sideband modulation, Extreme ultraviolet lithography, Scanning electron microscopy, Lithography

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Proceedings Article | 22 February 2021 Presentation + Paper

Curvilinear data format working group for MBMW era

Jin Choi, Soo Ryu, Sukho Lee, Minah Kim, JoonSoo Park, Buck Peter, Ingo Bork, Bhardwaj Durvasula, Sayalee Gharat, Nageswara Rao

Proceedings Volume 11610, 116100S (2021) https://doi.org/10.1117/12.2587109

KEYWORDS: Optical proximity correction, Mask making, Electronic design automation

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