We present on the additive micro-manufacturing of ceramic packaging, containing arbitrarily routed vias with a diameter and pitch as small as 10µm and 20µm, respectively. We accomplish this feat by pairing recently commercialized micro-printers based on digital micromirror devices with our UV curable pre-ceramic resin that enables dielectric ceramic printing. Ceramic interposers with thousands of vias were 3D printed, then metallized and finally indium bump bonded to test chips fabricated by standard semiconductor lithography. This technology enables unprecedented via routing and packaging options for the 3D integration of microelectronic subsystems and focal plane arrays.
Terahertz imaging systems have received substantial attention from the scientific community for their use in astronomy, spectroscopy, plasma diagnostics and security. One approach to designing such systems is to use focal plane arrays. Although the principle of these systems is straightforward, realizing practical architectures has proven deceptively difficult. A different approach to imaging consists of spatially encoding the incoming flux of electromagnetic energy prior to detection using a reconfigurable mask. This technique is referred to as coded aperture"or Hadamard"imaging. This paper details the design, fabrication and testing of a prototype coded aperture mask operating at WR-1.5 (500-750 GHz) that uses the switching properties of vanadium dioxide(VO2). The reconfigurable mask consists of bowtie antennas with vanadium dioxide VO2 elements at the feed points. From the symmetry, a unit cell of the array can be represented by an equivalent waveguide whose dimensions limit the maximum operating frequency. In this design, the cutoff frequency of the unit cell is 640 GHz. The VO2 devices are grown using reactive-biased target ion beam deposition. A reflection coefficient (S11) measurement of the mask in the WR-1.5 (500-750 GHz) band is conducted. The results are compared with circuit models and found to be in good agreement. A simulation of the transmission response of the mask is conducted and shows a transmission modulation of up to 28 dB. This project is a first step towards the development of a full coded aperture imaging system operating at WR-1.5 with VO2 as the mask switching element.
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