Mr. Steven Cornelissen Profile

Steven Cornelissen

Vice President of Engineering at Boston Micromachines Corp

SPIE Involvement:

Author

Publications (32)

Proceedings Article | 5 March 2013 Paper

Performance analysis of two high actuator count MEMS deformable mirrors

Peter Ryan, Steven Cornelissen, Charlie Lam, Paul Bierden

Proceedings Volume 8617, 861705 (2013) https://doi.org/10.1117/12.2005299

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Targeting Task Performance metric, Gemini Planet Imager, Planets, Coronagraphy, Mirrors, Adaptive optics, Exoplanets

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Proceedings Article | 13 September 2012 Paper

Flexure mount for a MEMS deformable mirror for the Gemini Planet Imager

Alexis Hill, Steven Cornelissen, Daren Dillon, Charlie Lam, Dave Palmer, Les Saddlemyer

Proceedings Volume 8450, 84500H (2012) https://doi.org/10.1117/12.926842

KEYWORDS: Microelectromechanical systems, Gemini Planet Imager, Mirrors, Actuators, Adaptive optics, Humidity, Deformable mirrors, Connectors, Computer aided design, Interfaces

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Proceedings Article | 15 February 2012 Paper

MEMS practice: from the lab to the telescope

Katie Morzinski, Andrew Norton, Julia Evans, Layra Reza, Scott Severson, Daren Dillon, Marc Reinig, Donald Gavel, Steven Cornelissen, Bruce Macintosh, Claire Max

Proceedings Volume 8253, 825304 (2012) https://doi.org/10.1117/12.910964

KEYWORDS: Microelectromechanical systems, Actuators, Adaptive optics, Gemini Planet Imager, Telescopes, Deformable mirrors, Calibration, Humidity, Inspection, Wavefronts

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Proceedings Article | 15 February 2012 Paper

MEMS deformable mirror actuators with enhanced reliability

S. Cornelissen, T. Bifano, P. Bierden

Proceedings Volume 8253, 825306 (2012) https://doi.org/10.1117/12.910742

KEYWORDS: Actuators, Electrodes, Microelectromechanical systems, Reliability, Resistors, Deformable mirrors, Mirrors, Electronics, Image segmentation, Resistance

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Proceedings Article | 14 February 2011 Paper

Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems

Mark Horenstein, Robert Sumner, Preston Miller, Thomas Bifano, Jason Stewart, Steven Cornelissen

Proceedings Volume 7930, 79300M (2011) https://doi.org/10.1117/12.876404

KEYWORDS: Actuators, Capacitors, Microelectromechanical systems, Mirrors, Transistors, Optical amplifiers, Amplifiers, Deformable mirrors, Field effect transistors, Multiplexing

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Proceedings Article | 11 February 2011 Paper

The use of a high-order MEMS deformable mirror in the Gemini Planet Imager

Lisa Poyneer, Brian Bauman, Steven Cornelissen, Joshua Isaacs, Steven Jones, Bruce Macintosh, David Palmer

Proceedings Volume 7931, 793104 (2011) https://doi.org/10.1117/12.876496

KEYWORDS: Actuators, Microelectromechanical systems, Gemini Planet Imager, Coronagraphy, Adaptive optics, Mirrors, Calibration, Wavefronts, Spatial frequencies, Signal to noise ratio

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Proceedings Article | 29 July 2010 Paper

High-power visible laser effect on a Boston Micromachines' MEMS deformable mirror

Andrew Norton, Donald Gavel, Daren Dillon, Steven Cornelissen

Proceedings Volume 7736, 77365O (2010) https://doi.org/10.1117/12.856635

KEYWORDS: Microelectromechanical systems, Deformable mirrors, High power lasers, Adaptive optics, Current controlled current source, Visible radiation, Silver, Aluminum, Spatial frequencies, Actuators

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Proceedings Article | 28 July 2010 Paper

MEMS deformable mirrors for astronomical adaptive optics

S. Cornelissen, A. Hartzell, J. Stewart, T. Bifano, P. Bierden

Proceedings Volume 7736, 77362D (2010) https://doi.org/10.1117/12.857296

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Wavefronts, Electronics, Adaptive optics, Mirrors, Astronomical adaptive optics, Astronomy, Gemini Planet Imager

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Proceedings Article | 18 February 2010 Paper

Through-wafer interconnects for high degree of freedom MEMS deformable mirrors

Alioune Diouf, Thomas Bifano, Jason Stewart, Steven Cornelissen, Paul Bierden

Proceedings Volume 7595, 75950N (2010) https://doi.org/10.1117/12.842341

KEYWORDS: Actuators, Gold, Diffractive optical elements, Microelectromechanical systems, Packaging, Silicon, Deformable mirrors, Error analysis, Semiconducting wafers, Silicon carbide

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Proceedings Article | 18 February 2010 Paper

Low power MEMS modulating retroreflectors for optical communication

Jason Stewart, David Freedman, Steven Cornelissen, Mark Horenstein, Peter Woskov, Jonathan Tang

Proceedings Volume 7595, 759505 (2010) https://doi.org/10.1117/12.844936

KEYWORDS: Modulation, Modulators, Microelectromechanical systems, Mirrors, Retroreflectors, Silicon, Actuators, Optical communications, Sensors, Reflectivity

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Proceedings Article | 18 February 2010 Paper

Reliability of MEMS deformable mirror technology used in adaptive optics imaging systems

Allyson Hartzell, Steven Cornelissen, Paul Bierden, Charlie Lam, Daniel Davis

Proceedings Volume 7595, 75950B (2010) https://doi.org/10.1117/12.845610

KEYWORDS: Reliability, Actuators, Microelectromechanical systems, Mirrors, Deformable mirrors, Adaptive optics, Yield improvement, Imaging systems, Code division multiplexing, Manufacturing

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SPIE Journal Paper | 1 July 2009

4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

Steven Cornelissen, Paul Bierden, Thomas Bifano, Charlie Lam Lam

JM3, Vol. 8, Issue 03, 031308, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158067

KEYWORDS: Microelectromechanical systems, Actuators, Deformable mirrors, Mirrors, Surface finishing, Ceramics, Electronics, Optical components, Electrodes, Silicon

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Proceedings Article | 12 May 2009 Paper

Deformable MEMS mirrors in secure optical communication system

Leah Ziph-Schatzberg, Thomas Bifano, Steven Cornelissen, Jason Stewart, Zvi Bleier

Proceedings Volume 7318, 73180T (2009) https://doi.org/10.1117/12.818831

KEYWORDS: Modulators, Modulation, Retroreflectors, Mirrors, Microelectromechanical systems, Telecommunications, Sensors, Signal detection, Silicon, Optical communications

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Proceedings Article | 24 February 2009 Paper

Secure optical communication system utilizing deformable MEMS mirrors

Leah Ziph-Schatzberg, Thomas Bifano, Steven Cornelissen, Jason Stewart, Zvi Bleier

Proceedings Volume 7209, 72090C (2009) https://doi.org/10.1117/12.812145

KEYWORDS: Modulators, Mirrors, Retroreflectors, Modulation, Microelectromechanical systems, Telecommunications, Silicon, Signal detection, Laser communications, Sensors

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Proceedings Article | 24 February 2009 Paper

Preliminary characterization of Boston Micromachines' 4096-actuator deformable mirror

Andrew Norton, Julia Evans, Donald Gavel, Daren Dillon, David Palmer, Bruce Macintosh, Katie Morzinski, Steven Cornelissen

Proceedings Volume 7209, 72090I (2009) https://doi.org/10.1117/12.811681

KEYWORDS: Actuators, Adaptive optics, Microelectromechanical systems, Deformable mirrors, Gemini Planet Imager, Spatial frequencies, Wavefronts, Mirrors, Telescopes, Surface finishing

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Proceedings Article | 23 July 2008 Paper

Stable flexure mounting of a MEMS deformable mirror for the GPI Planet Imager

Alexis Hill, Darren Erickson, Joeleff Fitzsimmons, Paul Bierden, Steven Cornelissen, Dave Palmer

Proceedings Volume 7018, 70181F (2008) https://doi.org/10.1117/12.789408

KEYWORDS: Microelectromechanical systems, Gemini Planet Imager, Adaptive optics, Humidity, Actuators, Deformable mirrors, Mirrors, Planets, Gemini Observatory, Optical mounts

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Proceedings Article | 30 April 2008 Paper

MEMS deformable mirrors for space and defense applications

T. Bifano, Paul Bierden, Steven Cornelissen

Proceedings Volume 6959, 695914 (2008) https://doi.org/10.1117/12.781676

KEYWORDS: Actuators, Mirrors, Microelectromechanical systems, Deformable mirrors, Wavefronts, Defense and security, Silicon, Control systems, Imaging systems, Chemical elements

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Proceedings Article | 8 February 2008 Paper

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

S. Cornelissen, P. Bierden, T. Bifano

Proceedings Volume 6888, 68880V (2008) https://doi.org/10.1117/12.770620

KEYWORDS: Actuators, Microelectromechanical systems, Mirrors, Deformable mirrors, Surface finishing, Ceramics, Electrodes, Silicon, Silicon films, Electronics

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Proceedings Article | 8 February 2008 Paper

Fabrication of single crystalline MEMS DM using anodic wafer bonding

Alioune Diouf, Mike Gingras, Jason Stewart, Thomas Bifano, Steven Cornelissen, Paul Bierden

Proceedings Volume 6888, 68880U (2008) https://doi.org/10.1117/12.763124

KEYWORDS: Semiconducting wafers, Actuators, Wafer bonding, Mirrors, Microelectromechanical systems, Glasses, Silicon, Etching, Electrodes, Sputter deposition

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Proceedings Article | 12 September 2007 Paper

Advances in MEMS deformable mirror technology for laser beam shaping

Steven Menn, Steven Cornelissen, Paul Bierden

Proceedings Volume 6663, 66630M (2007) https://doi.org/10.1117/12.739042

KEYWORDS: Actuators, Deformable mirrors, Microelectromechanical systems, Adaptive optics, Mirrors, Electrodes, Laser communications, Wavefronts, Beam shaping, Electronics

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Proceedings Article | 29 August 2006 Paper

Development of a 4096 element MEMS continuous membrane deformable mirror for high contrast astronomical imaging

S. Cornelissen, P. Bierden, T. Bifano

Proceedings Volume 6306, 630606 (2006) https://doi.org/10.1117/12.687687

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Mirrors, Electrodes, Surface finishing, Silicon, Planets, Etching, Adaptive optics

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Proceedings Article | 8 June 2006 Paper

Correction of large amplitude wavefront aberrations

S. Cornelissen, P. Bierden, T. Bifano, R. Webb, S. Burns, S. Pappas

Proceedings Volume 6018, 601811 (2006) https://doi.org/10.1117/12.669370

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Proceedings Article | 23 January 2006 Paper

Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics

Jason Stewart, Thomas Bifano, Paul Bierden, Steven Cornelissen, Timothy Cook, B. Martin Levine

Proceedings Volume 6113, 61130O (2006) https://doi.org/10.1117/12.651373

KEYWORDS: Mirrors, Actuators, Coronagraphy, Electromechanical design, Polishing, Microelectromechanical systems, Surface roughness, Planets, Silicon, Oxides

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Proceedings Article | 23 January 2006 Paper

Chip-scale integrated driver for electrostatic DM control

Duk Joong Kim, Thomas Bifano, Steven Cornelissen, Allyn Hubbard

Proceedings Volume 6113, 61130X (2006) https://doi.org/10.1117/12.651328

KEYWORDS: Microelectromechanical systems, Mirrors, Electrodes, Switches, Resistors, Actuators, Logic, Electronics, Binary data, Transistors

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Proceedings Article | 25 October 2004 Paper

Megapixel wavefront correctors

Thomas Bifano, Paul Bierden, Hao Zhu, Steven Cornelissen, Jin Hong Kim

Proceedings Volume 5490, (2004) https://doi.org/10.1117/12.549393

KEYWORDS: Actuators, Silicon, Spatial light modulators, Mirrors, Electrodes, Wavefronts, Optics manufacturing, Reflectivity, Aluminum, Electronics

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Proceedings Article | 12 October 2004 Paper

Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control

Hao Zhu, Paul Bierden, Steven Cornelissen, Thomas Bifano, Jin-Hong Kim

Proceedings Volume 5553, (2004) https://doi.org/10.1117/12.559929

KEYWORDS: Electronics, Actuators, Metals, Mirrors, Electrodes, Photoresist materials, Etching, Aluminum, Spatial light modulators, Microelectromechanical systems

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Proceedings Article | 20 January 2003 Paper

MEMS spatial light modulators with integrated electronics

Thomas Becker, Thomas Bifano, Hocheol Lee, Michele Miller, Paul Bierden, Steven Cornelissen

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477931

KEYWORDS: Actuators, Mirrors, Metals, Electronics, Microelectromechanical systems, Aluminum, Electrodes, Photoresist materials, Etching, Control systems

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Proceedings Article | 20 January 2003 Paper

Large-scale polysilicon surface-micromachined spatial light modulator

Clara Dimas, Julie Perreault, Steven Cornelissen, Harold Dyson, Peter Krulevitch, Paul Bierden, Thomas Bifano

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477932

KEYWORDS: Actuators, Spatial light modulators, Mirrors, Microelectromechanical systems, Micromirrors, Reflectivity, Interferometers, Packaging, Atmospheric optics, Spatial resolution

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Proceedings Article | 19 April 2002 Paper

Large-scale metal MEMS mirror arrays with integrated electronics

Thomas Bifano, Paul Bierden, Steven Cornelissen, Clara Dimas, Hocheol Lee, Michele Miller, Julie Perreault

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462845

KEYWORDS: Actuators, Microelectromechanical systems, Mirrors, Metals, Electronics, Electrodes, Aluminum, Optics manufacturing, Spatial light modulators, Surface finishing

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Proceedings Article | 19 April 2002 Paper

Polysilicon surface-micromachined spatial light modulator with novel electronic integration

Clara Dimas, Thomas Bifano, Paul Bierden, Julie Perreault, Peter A. Krulevitch, Ryan Roehnelt, Steven Cornelissen

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462846

KEYWORDS: Spatial light modulators, Mirrors, Actuators, Electrodes, Microelectromechanical systems, Etching, Deep reactive ion etching, Analog electronics, Semiconducting wafers, Thin films

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Proceedings Article | 1 February 2002 Paper

Micro-electromechanical spatial light modulators with integrated electronics

Steven Cornelissen, Thomas Bifano, Paul Bierden

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454712

KEYWORDS: Actuators, Mirrors, Metals, Electronics, Microelectromechanical systems, Aluminum, Sputter deposition, Electromechanical design, Spatial light modulators, Electrodes

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Proceedings Article | 2 October 2001 Paper

MEMS spatial light modulators with integrated electronics

Steven Cornelissen, Thomas Bifano, Paul Bierden

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443099

KEYWORDS: Actuators, Metals, Mirrors, Microelectromechanical systems, Electronics, Etching, Electrodes, Photoresist materials, Spatial light modulators, Sputter deposition

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Showing 5 of 32 publications

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